Abstract
Influence of Si substrate texturing on growth, microstuctural and electrochemical properties of lithium cobalt oxide (LiCoO2) cathode films was investigated. A batch of rf magnetron sputtered LiCoO2 films were prepared on both Au/Ti/SiO2/(polished) Si and Au/Ti/SiO2/(textured) Si substrates and the film properties were studied, systematically. As-grown films on polished Si substrates were exhibited partially ordered rock-salt structure with a very poor electrochemical performance. However, the as-grown films on textured Si substrates exhibited relatively predominant (0 0 3) orientation with R 3¯ m symmetry and exhibited an initial discharge capacity of 57.5 μAhcm−2 μm−1 with an appreciable capacity fade rate of 0.07%, even after 50 cycles. Electrochemical performance of these films was in close comparison with the annealed (650 °C) LiCoO2 films of Au/Ti/SiO2/(polished) Si substrates. The experimental observations were thoroughly demonstrated and suggested that the as-grown LiCoO2 films on textured Si substrates can be useful for all types of 2D solid state Li+-ion microbattery applications.
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