Abstract
We use a dynamic scanning electron microscope (DySEM) to map the spatial distribution of the vibration of a cantilever beam. The DySEM measurements are based on variations of the local secondary electron signal within the imaging electron beam diameter during an oscillation period of the cantilever. For this reason, the surface of a cantilever without topography or material variation does not allow any conclusions about the spatial distribution of vibration due to a lack of dynamic contrast. In order to overcome this limitation, artificial structures were added at defined positions on the cantilever surface using focused ion beam lithography patterning. The DySEM signal of such high-contrast structures is strongly improved, hence information about the surface vibration becomes accessible. Simulations of images of the vibrating cantilever have also been performed. The results of the simulation are in good agreement with the experimental images.
Highlights
The progressing miniaturization of technical applications leads to a growing interest in imaging techniques with high resolution
In this paper we present measurements performed with the cantilever deposited platinum rings
In this paper we demonstrate the use of artificial, high-contrast structures on vibrating cantilevers in dynamic scanning electron microscope (DySEM) imaging techniques
Summary
The progressing miniaturization of technical applications leads to a growing interest in imaging techniques with high resolution. The imaging process is based on a modulation of secondary electron (SE) signal at a given electron beam position due to a local contrast variation on the cantilever For this reason, a flat surface of a cantilever with no material contrast is not sensitive to this technique, and only the edges and the very end of the lever lead to an image contrast. This is useful if, for example, due to the attachment of mass [17–20] or due to contact of the cantilever tip with a surface, deviations from the conventional vibration patterns are expected In such cases, the precise knowledge of time-varying spatial distribution of vibration displacement is important for the interpretation of every cantilever-based sensor [12, 21]
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