Abstract
The extension of Rutherford backscattering spectrometry (RBS) to heavier mass projectiles (HIRBS) has been limited, as these projectiles cause much more radiation damage in the detectors and curtail their lifetime. Despite this limitation interest in the use of heavier projectiles continues as there are several significant benefits which can accrue from their use. To properly understand the interaction of heavy ions with solids a systematic study of the energy loss and straggling of MeV heavy ions has been conducted and an empirical expression for these terms has been obtained. This expression has allowed the development of a realistic computer simulation which accurately predicts the energy spectra for a wide range of energies, projectiles and targets. In parallel with that study, measurements of the depth resolution of Si/Ge multilayer films using 4–6 MeV C projectiles have been used to verify the simulation.
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