Abstract
The extension of Rutherford backscattering spectrometry (RBS) to heavier mass projectiles has several advantages over conventional RBS. To understand the interaction of heavy ions with solids properly, a systematic study of the energy straggling of MeV heavy ions has led to an empirical formula for this term. This formula, along with the stopping power, lateral spread and multiple scattering, predicts the energy width for a wide range of energies, projectiles and targets, allowing the development of realistic computer simulation for the energy spectra. This model has been verified by measurements of the depth resolution of 4 and 6 MeV C projectiles using Si/Si 1− x Ge x /Si strained layer superlattices (SLSs) samples.
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