Abstract
In recent years Klocke Nanotechnik and partners have developed a new Nanorobotics system that builds a bridge between nanotechnology and classical mechanical engineering. These products combine the advantages of the two technologies: the backlash-free movement of up to 2 kg of load over a stroke of up to 70 mm with a resolution of a few nanometers. This series of positioning modules offers numerous degrees of freedom in the smallest volume for microassembly, interconnection technology, analysis, and reliability testing. Integrated position sensors allow automatic usage, also in rough production technology applications. The repeatability of classical assembly lines is limited to a few microns. Nanorobotics modules allow absolute positioning within 50 nm.
Published Version
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