Abstract
Interfacial reaction and the energy-band alignments of HfO2 films on p-GaAs substrate were investigated by using x-ray photoelectron spectroscopy and high-resolution transmission electron microscopy. It has been demonstrated that the alloying of HfO2 with Al2O3 (HfAlO) can significantly reduce native oxides formation and increases the valence-band offsets (VBOs) at HfO2∕p-GaAs interface. In addition, the effects of Si interfacial passivation layer on band alignments have also been studied. VBO at HfO2∕p-GaAs, HfAlO∕p-GaAs, and HfO2∕Si∕p-GaAs interfaces were 2.85, 2.98, and 3.07eV, respectively.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
