Abstract
The characteristics of a PdB liquid metal ion source have been investigated in terms of its energy spread, current voltage, and total energy distribution. The beam energy spread increases with ion source applied voltage and species mass. The total energy distribution curve exhibits full width at half maximum increase from 20 to 26 eV as the total current increases from 6 to 25 μA. The energy spread of the heavy isotope, 106Pd+, is 44 eV at an extractor applied voltage of 8.5 keV. The energy spread of 11B+ is observed to saturate at high total current (or high extractor applied voltage). This implies that beyond 8.5 keV, the energy spread of 11B+ is independent of applied voltage. Throughout the measurement, the energy spread remained a Gaussian distribution which is an inherent characteristic of sources with Taylor cone formation.
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