Abstract
Energy-resolved mass spectroscopy studies during discharge in Ar+N 2 and Ar+C 2H 2 gas mixtures in a triode ion-plating apparatus (Balzers BAI 730) revealed a high degree of acetylene (C 2H 2) decomposition under typical conditions suitable for titanium evaporation. In the case of the Ar+C 2H 2 gas mixture, the most abundant neutral species besides argon is hydrogen, and not acetylene as would be expected. On the other hand, the 12C + ion is the most abundant carbon-containing species. The ratio between C +, CH 3 + and C 2H 2 + ions and titanium ions (Ti +, T 2+) decreases with increasing arc current. By careful adjustment of the discharge parameters, either a plasma rich in C x H y radicals with a low metal evaporation rate or plasma with a high evaporation rate but with almost completely decomposed acetylene, i.e. with C + and H n=1–3 + only, can be obtained.
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