Energy Dispersive X-ray Analysis in the Electron Microscope

Abstract

Ch 1. HISTORY. Ch 2. PRINCIPLES. What are X-rays?. Ionization cross-section. Fluorescence yield. X-ray absorption. Insulators, conductors and semiconductors. Ch 3. THE ENERGY-DISPERSIVE X-RAY DETECTOR. Introduction.The semiconductor X-ray detector. The X-ray analyser. Details of the spectrum. New detector technologies. Ch 4. SPECTRAL PROCESSING. Introduction. Background stripping. Background modelling. Deconvolution of overlapping peaks. Statistical considerations. The impact of statistics. The effect of the background. Analytical strategy. Ch 5. ENERGY-DISPERSIVE X-RAY MICROANALYSIS IN THE SCANNING ELECTRON MICROSCOPE. Introduction. Fundamentals of X-ray analysis in the SEM. Quantitative microanalysis in the SEM. Semi-quantitative microanalysis in the SEM. EDX analysis in the VP-SEM and ESEM. Inhomogeneous samples. Concluding remarks. Ch 6. X-RAY MICROANALYSIS IN THE TRANSMISSION ELECTRON MICROSCOPE. Introduction. Principles of quantitative analysis in the TEM. Absorption, fluorescence and other sources of error. Spatial resolution. Microscope considerations. Ch 7. X-RAY MAPPING. Introduction. Hardware implementation. Statistical considerations. Other applications. Concluding comments. Ch 8. ENERGY-DISPERSIVE X-RAY ANALYSIS COMPARED WITH OTHER TECHNIQUES. Introduction. Wavelength-dispersive X-ray analysis - electron probe microanalysis (EPMA). Electron energy-loss spectroscopy (EELS). Auger electron spectroscopy (AES). X-ray photoelectron spectroscopy (XPS). X-ray fluorescence (XRF). Atom probe. Overall strengths and weaknesses.