Abstract

The method developed for fundamental understanding of energetic exchanges between monomer molecules and argon carrier gas in a dielectric barrier discharge (DBD) has previously proven merit. In this seventh article related to this methodology, research has been extended to a new family of precursors: anhydrides. Monomers (typically ‰) were mixed with 10 slm of Ar in a 20 kHz, 8 kV (peak‐to‐peak) DBD corresponding to an energy per cycle of 1600 μJ for pure Ar. For each of the investigated monomers Em, the energy absorbed per molecule was plotted as a function of precursor flow rate. The influence of chemical structure (C/O ratio, unsaturation) has been investigated and compared with previous data for other types of precursors. Thin plasma polymer coatings were deposited; in addition to measuring deposition rates, we also present relationships between Em values, spectro‐ellipsometric and FTIR measurements.

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