Abstract
The method developed for fundamental understanding of energetic exchanges between monomer molecules and argon carrier gas in a dielectric barrier discharge (DBD) has previously proven merit. In this seventh article related to this methodology, research has been extended to a new family of precursors: anhydrides. Monomers (typically ‰) were mixed with 10 slm of Ar in a 20 kHz, 8 kV (peak‐to‐peak) DBD corresponding to an energy per cycle of 1600 μJ for pure Ar. For each of the investigated monomers Em, the energy absorbed per molecule was plotted as a function of precursor flow rate. The influence of chemical structure (C/O ratio, unsaturation) has been investigated and compared with previous data for other types of precursors. Thin plasma polymer coatings were deposited; in addition to measuring deposition rates, we also present relationships between Em values, spectro‐ellipsometric and FTIR measurements.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.