Abstract
Emission stability of a Au–Si–Be liquid metal (LM) ion source under various gas environments has been investigated. It was found that the ion emission stability was influenced by oxygen or water vapor which seemed to result in oxidation of the alloy surface. Water vapor is particularly active with Be atoms in the alloy. We have confirmed that stationary, stable ion beams (Si, Be) with a constant ion current and a beam diameter can be obtained by operating the ion source under a high vacuum enclosure of 2×10-7 Torr in a 100 kV focused ion beam implanter (FIBI).
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
