Abstract
The effects of ambient gases on emission properties of a Pd-Ni-Si-Be-B LM (liquid metal) ion source have been studied. Oxygen and water vapor had a significant effect on the ion emission stability. A decrease in B ion flux was also observed as the operating period continued. This decrease is explained by the selective evaporation of B oxide in the alloy formed by a reaction between boron and water vapor. Very stable and reliable ion emission with a long lifetime (exceeding 100 hours) was obtained by operating the source in a 8×10-9 Torr UHV.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
