Abstract
A diagnostic feature of silane-hydrogen glow-discharges is obtained by analysing the A2 Delta -X2II band system of the SiH radical. The measurement is performed with a moderate resolution spectrometer and, if combined with numerical calculation of the spectrum, is shown to lead to rotational and vibrational effective temperatures. Abnormal excitation of SiH is observed; however both results are relevant for comparing the microscopic state of the glow-discharge in various thin-film deposition devices.
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