Abstract
Batch-fabricated lateral fingerlike nanodiamond emitters with sharp apexes were characterized for emission current scaling to examine the scaling effect of the number of emitters with respect to the forward emission current. Three nanodiamond lateral device configurations were evaluated: 6- 125- and 2000-finger emitter structures. Current scaling behavior was observed for a given electric field, e.g., 10V∕μm, demonstrating emission current of 1.1, 11.3, and 109μA, respectively. The augmentation in overall emission current of the multifingered lateral emitters is attributed to the increase in the emitter area and thereby the number of potential emission sites in the cathode. Deviation from ideal scaling, factors contributing to deviation, and the design/process developments addressed to mitigate the nonideality are discussed.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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