Emission characteristics and parameters of a glow discharge in an argon-xenon-chlorine mixture

Abstract

We present the results of a study of the emission characteristics of a low-pressure longitudinal glow discharge in an Ar-Xe-Cl2 mixture (p = 0.5–6.0 kPa) and numerical modeling of its plasma parameters as a function of the parameter E/P. We optimized the average emission power of the discharge in the spectral range 160–310 nm as a function of the discharge current, the pressure and composition of the gas mixture. The plasma parameters were calculated for the optimal mixture (according to experimental data) and included obtaining the dependences of the electron transport and energy characteristics, the power losses per unit pressure in the discharge going toward elementary electron processes in the plasma, and also the ionization and attachment coefficients as a function of the parameter E/P. The results of numerical modeling of the glow discharge parameters allow us to provide a qualitative basis for the emission distribution in the spectrum of a plasma based on an Ar-Xe-Cl2 mixture.