Abstract

Main problems are considered of the non-equilibrium chemical kinetics which includes plasma chemical kinetics as a particular case. Mechanisms are analysed of plasma chemical reactions occurring under electron impact and through electronic-vibrational excited states. Main equations of plasma chemical kinetics and formulas for the reaction rate factor are discussed. Mutual influence of vibrational relaxation and dissociation is shown to be significant under low temperature plasma conditions. Some approaches are considered for determination of the rate factors for plasma chemical reactions.

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