Elemental composition x-ray fluorescence analysis with a TES-based high-resolution x-ray spectrometer

Abstract

The accurate analysis of the elemental composition plays a crucial role in the research of functional materials. The emitting characteristic x-ray fluorescence (XRF) photons can be used for precisely discriminating the specified element. The detection accuracy of conventional XRF methodology using semiconductor detector is limited by the energy resolution, thus posing a challenge in accurately scaling the actual energy of each XRF photon. We adopt a novel high-resolution x-ray spectrometer based on the superconducting transition-edge sensor (TES) for the XRF spectroscopy measurement of different elements. Properties including high energy resolution, high detection efficiency and precise linearity of the new spectrometer will bring significant benefits in analyzing elemental composition via XRF. In this paper, we study the L-edge emission line profiles of three adjacent rare earth elements with the evenly mixed sample of their oxide components: terbium, dysprosium and holmium. Two orders of magnitude better energy resolution are obtained compared to a commercial silicon drift detector. With this TES-based spectrometer, the spectral lines overlapped or interfered by background can be clearly distinguished, thus making the chemical component analysis more accurate and quantitative. A database of coefficient values for the line strength of the spectrum can then be constructed thereafter. Equipped with the novel XRF spectrometer and an established coefficient database, a direct analysis of the composition proportion of a certain element in an unknown sample can be achieved with high accuracy.