Abstract
The resonance of electrostatically actuated amorphous silicon microbridges immersed in de-ionized water is characterized. It is shown that under correct actuation conditions resonance can be measured in water without electrolysis or electrode screening. The resonance frequency of these nonpassivated structures is also studied in air and under vacuum for microbridges with different lengths. When the operating medium is changed from vacuum to air, the resonance frequency decreases by 5% and the quality factor decreases from approximately 1000 to 100. Operation in de-ionized water produces a 60% shift in resonance frequency to lower values and the quality factor decreases to 10.
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