Abstract
A new electrostatic torsion mirror with a silicon/silicon structure has been developed for optical disk drives. It positions the beam spot accurately on an optical disk 1),2). This mirror is mounted on a 3.8 x 4.5 mm chip and weighs approximately 25 mg. Thus, downsizing of optical heads can be realized by using this torsion mirror. This torsion mirror is composed of an elliptic mirror plate, twin supporting beams, and a pair of driving electrodes. The forms of these elements define the mechanical parameters of this torsion mirror: natural frequency and damping ratio. These mechanical parameters are designed to satisfy the specifications for a high-frequency positioning of the optical beam spot. Experimental frequency responses showed that a test model had a second modal mechanical frequency of over 50 kHz, and the characteristics were in good agreement with the designed values. This torsion mirror will make possible more accurate spot positioning than can be achieved using conventional electromagnetic actuators.
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