Abstract
Summary form only given. Micromachined optical switches are under intensive study for data communication networks and measurement instruments. We have demonstrated electrostatic micro torsion mirrors for fiber optic switches. However, the electrostatic operation required large operation voltage. On the other hand the magnetic operation is expected to realize self-latching optical switches, which hold on/off-state without power consumption. We study the magnetic operation of NiFeCo sputterd torsion mirrors.
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