Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel)

Abstract

We have proposed and developed Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel). This actuator consists of two fixed electrodes having many oblique ciliary electrodes distributed on a plate, which like foxtail grass, and a moving electrode that is sandwiched by the fixed electrodes. When the voltage is applied between the fixed electrode and the moving electrode, the electrostatic force is generated at the gap between the moving electrode and the ciliary electrodes, and the moving electrode sticks to the ciliary electrodes and is attracted to the fixed electrode. The moving electrode moves parallel to the fixed electrode as well as perpendicularly to it. The E-Maccel was fabricated by micromachining. The ciliary electrodes were made of two-layer polyimide film. The 4382 ciliary electrodes, each of which was 3 μm thick, 300 μm long and 150 μm wide, were fabricated on a 20 mm x 20 mm Pyrex glass plate. The fabricated E-Maccel was driven, and the movement of 9.6 μm/cycle was observed at the driving voltage of 150 V.