3226 繊毛電極分布型静電マイクロアクチュエータの動作特性

Abstract

We have developed Electrostatic Micro Actuator with Distributed Ciliary Electrodes (E-Maccel). This actuator consists of two fixed electrodes having many oblique ciliary electrodes distributed on the plate, which like foxtail grass, and a moving electrode that is sandwiched by the fixed electrodes. When the voltage is applied between the fixed electrode and the moving electrode, the electrostatic force is generated at the gap between the moving electrode and the ciliary electrodes, and the moving electrode sticks to the ciliary electrodes and is attracted to the fixed electrode. The moving electrode moves parallel to the fixed electrode as well as perpendicularly to it. The E-Maccel was fabricated by micromachining. The 4382 ciliary electrodes, each of which was 3μm thick, 300μm long and 150μm wide, were fabricated on a 20mm x 20mm Pyrex glass plate. Driving Characteristics of the fabricated E-Maccel was investigated. The movement of 9.6 μm/cycle was observed at the driving voltage of 150V.