Abstract
The reliability and stability of MEMS electrostatic comb resonators have become bottlenecks in practical applications. However, there are few studies that comprehensively consider the nonlinear dynamic behavior characteristics of MEMS systems and devices in a coupled field so that the related simulation accuracy is low and cannot meet the needs of design applications. In this paper, to avoid the computational complexity and the uncertainty of the results of three-field direct coupling and take into the damping nonlinearity caused by coupled fields, a novel electrostatic-fluid-structure three-field indirect coupling method is proposed. Taking an actual microcomb resonant electric field sensor as an example, an electrostatic-fluid-structure multiphysics coupling 3D finite element simulation model is established. After considering the influence of nonlinear damping concerning the large displacement of the structure and the microscale effect, multifield coupling dynamics research is carried out using COMSOL software. The multiorder eigenmodes, resonant frequency, vibration amplitude, and the distribution of fluid load of the microresonator are calculated and analyzed. The simulated data of resonance frequency and displacement amplitude are compared with the measured data. The results show that the fluid load distribution of the microelectrostatic comb resonator along the thickness direction is high in the middle and low on both sides. The viscous damping of the sensor under atmospheric pressure is mainly composed of the incompressible flow damping of the comb teeth, which is an order of magnitude larger than those of other parts. Compared with the measured data, it can be concluded that the amplitude and resonance frequency of the microresonator considering the nonlinear damping force and residual thermal stress are close to the experimental values (amplitude error: 15.47%, resonance frequency error: 12.48%). This article provides a reference for studies on the dynamic characteristics of electrostatically driven MEMS devices.
Highlights
With the development of micro/nanoprocessing technology and Internet of Things technology, microelectromechanical systems (MEMS) are being widely used in electronic communications, smart homes, wearable electronic equipment, medical care, and transparent power grids
To accurately predict the characteristic parameters of a MEMS resonator, including the resonance frequency, amplitude, and resonant mode, it is of great significance to study the multifield coupling nonlinear dynamics of microcomb resonators and to build a multifield coupling numerical model
The physical concepts of the above methods are clear, they cannot comprehensively consider the large displacement of the structure, distributed mass and stiffness, multiorder vibration eigenmodes, microscale effects, residual prestress, nonlinear vibration characteristics, stiffness softening and hardening effects, energy dissipation, complex external environmental influences, multifield coupling effects and other factors, which result in limitations in accurately calculating the key performance parameters of the MEMS resonator under the multifield interaction of the electrostatic fluid structure
Summary
With the development of micro/nanoprocessing technology and Internet of Things technology, microelectromechanical systems (MEMS) are being widely used in electronic communications, smart homes, wearable electronic equipment, medical care, and transparent power grids. The physical concepts of the above methods are clear, they cannot comprehensively consider the large displacement of the structure, distributed mass and stiffness, multiorder vibration eigenmodes, microscale effects, residual prestress, nonlinear vibration characteristics, stiffness softening and hardening effects, energy dissipation, complex external environmental influences (temperature, humidity, pressure, etc.), multifield coupling effects and other factors, which result in limitations in accurately calculating the key performance parameters of the MEMS resonator under the multifield interaction of the electrostatic fluid structure. The above theoretical studies on microelectrostatic comb resonators have been mostly carried out through electrostatic-structure bidirectional coupling simulations, without considering air damping or taking air damping as a fixed constant, to simulate the resonance frequency and amplitude of the microresonator.
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