Abstract
In the past years, researches demonstrated the great potential of novel MOEMS vibration sensors regarding their displacement resolution and sensitivity. The authors show that it is possible to further enhance the dynamic range of these sensors. This is achieved by utilizing feedback mechanisms such as electrostatic actuation without any crosstalk to the optical readout. Furthermore, this allows for canceling out unwanted ringing. The discussed proof of concept prototypes incorporate two electrostatic comb-drive actuators. They enable the seismic mass to reset along the main oscillation axes over a path of several microns and up to the resonance frequency of 400 Hz. It was proven that there is no unwanted crosstalk between the actuation and the position readout. The MOEMS readout features a sensitivity of approximately 200 mV/μm with a noise equivalent displacement of 35 pm/√Hz.
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