Abstract
An ultra-high vacuum pump has been developed based on the combined effects of ionization, excitation and sputtering. A cold-cathode discharge in magnetic field is employed with no hot filaments nor moving parts. The ultimate vacuum attainable is not yet known but is probably below 2×10−10 mm Hg. A pumping speed of about 10 liters/sec for air has been recorded at 1×10−7 mm Hg. The pump replaces liquid nitrogen-trapped oil diffusion pumps for pumping microwave tubes.
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