Abstract

We have investigated the electronic states of clean and BF 3 adsorbed Si(1 0 0) surfaces at low temperature by means of high resolution Si 2p photoelectron spectroscopy. The peak intensities of upper atom and lower atom of the asymmetric dimer in Si 2p spectra do not change even at 30 K compared with those at higher temperature up to 300 K, indicating that the dimer is asymmetric in the ground state. In order to investigate chemical reactivity of asymmetric dimer on Si(1 0 0), a typical Lewis acid molecule BF 3 is adsorbed on Si(1 0 0). We have found that BF 3 molecules are dissociated into BF 2 and F on Si(1 0 0) and dissociated species (BF 2 and F) are adsorbed predominantly on the up dimer atoms of the asymmetric dimers.

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