Electronic energy loss of swift H+ and He+ ions in solids with material science applications

Abstract

We calculate the electronic energy loss of swift H+ and He+ ion beams in several solids with applications in material science and microelectronics, namely Ti, Fe, Ge, Pd, LiF and Si3N4. Our calculations are based on the dielectric formalism, where the charge density of the projectile is described by the Brandt–Kitagawa model, with the addition of projectile polarization. We take into account the different charge states of the projectile inside the target and the energy loss due to electron capture and loss processes. Using a realistic description of the target energy loss function, we obtain results that show a good agreement with available experimental data in a wide range of projectile energies.