Abstract

Electron temperature and number density are investigated employing hollow cathode dc discharge in <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">${\rm O}_{2}$</tex></formula> . Electron temperature is found to decrease from 3 to 1.85 eV as the pressure increases from 75 to 375 mTorr. Positive and negative ion densities are determined as a function of plasma gas pressure. <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$I{-}V$</tex></formula> curves are evaluated employing the Allen–Boyd–Reynolds (ABR), current balance, orbital motion limited, and the floating potential (FP) methods. The ABR method is found to yield the highest positive ion number density, whereas the FP method results for <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$n_{+}$</tex></formula> are extremely small for any meaningful data. Present results are compared to those obtained employing global simulation method as well as with other experimental groups. <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">${\rm O}_{2}$</tex></formula> electronegativity results are compared with other experimental and theoretical groups. Optical emission spectroscopy is employed and intensity ratio for the 777 and 845-nm lines is obtained for comparison with other groups concluding that <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">${\rm O}^{-}$</tex></formula> is the dominant species.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call