Abstract

Secondary electron energy and angle dependent differential cross sections for the production of cations SiHn+ (n=0–3), H2+ and H+ resulting from dissociative ionization of SiH4by electron collision have been evaluated at fixed incident electron energies of 100 and 200 eV. The semiempirical formulation of Jain and Khare which requires the oscillator strength data as a major input has been employed. In the absence of experimental data for differential cross sections, the corresponding derived integral partial and total ionization cross sections in the energy range varying from ionization threshold to 1000 eV revealed a satisfactory agreement with the available experimental and theoretical data. We have also evaluated the ionization rate coefficients on the basis of calculated partial ionization cross sections and Maxwell-Boltzmann energy distributions.

Highlights

  • This work is a part of our project on electron impact ionization on technological molecules in low-energy regimes

  • This paper reports the spectrum of the single differential cross sections with the energy of secondary electron produced in the ionization of silane molecule by electron collision at fixed incident electron energies of 100 and 200 eV, employing a semiempirical formalism based on Jain and Khare approach [18,19,20,21]

  • In the threshold energy range, the atomic photoionization cross sections include the contribution of the structures and many body states produced near onsets [5, 6] which are reflected in the present calculations for energy dependent differential cross sections

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Summary

Introduction

This work is a part of our project on electron impact ionization on technological molecules in low-energy regimes. Advances in Physical Chemistry sections in terms of the partial ionization cross sections leading to the formation of various cations SiHn+ (n = 0– 3), H2+ , and H+ through dissociation of SiH4 by electron collision are compared with the available experimental and theoretical data.

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