Electron Transport Properties of Pt Nanoarch Fabricated by Electron-Beam-Induced Deposition

Abstract

Pt nanoarches were fabricated by electron-beam-induced deposition. The resistances of the nanoarches with oxygen-radical process, annealing in a furnace, and joule heating by current flow through the nanoarch were measured at room temperature and low temperatures to discuss the coherent electron field emission from the material. It is found that the resistance of the nanoarch increases by the oxygen-radical process and decreases by the current passing through the nanoarch due to the temperature rise. The decreased resistance should contribute to the coherent electron emission.