Abstract
The electron temperature in a low-pressure microwave electron cyclotron resonance slot antenna produced plasma is obtained. The upper excited atomic level populations have been measured through atomic emission spectroscopy. It has been shown that the Corona balance provides a good description of such levels and, based on this fact, a simple argon collisional-radiative model has been used in the temperature determination.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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