Electron spectroscopic imaging of thick crystalline specimens

Abstract

Electron spectroscopic imaging (ESI) by an energy-filtering electron microscope (EFEM, Zeiss EM902) shows the following advantages when compared with the unfiltered bright-field mode:1.The zero-loss image does not contain the contribution of inelastically scattered electrons. Though plasmon scattering shows a conversation of Bragg contrast - edge and bent contours and lattice defect images -, the angular distribution of inelastically scattered electrons results in a broader spectrum of excitation errors and a blurring of Bragg contrast.2.The zero-loss image avoids the chromatic aberration of inelastically scattered electrons for medium specimen thicknesses and can be applied so long as the intensity of the zero-loss peak in the electron energy-loss spectrum (EELS) is high enough for an exposure in a reasonable time (<100 s).3.Thick specimens with negligible zero-loss intensity can be imaged with an energy window at the highest multiple plasmon loss of the Poisson distribution or at the most probable energy of a Landau distribution. The angular distribution of electrons with these energy losses is so broad that the Bragg contrast is blurred, and the contrast is only caused by anomalous absorption effects similar to multi-beam images in the STEM mode when using a large probe aperture.