Electron spectroscopic imaging and diffraction: applications II materials science

Abstract

With imaging energy filters becoming commercially available in transmission electron microscopy many of the limitations of conventional TEM instruments can be overcome. Energy filtered images of diffraction patterns can now be recorded without scanning using efficient parallel (2-dimensional detection. We have evaluated a prototype of the Zeiss EM 912 Omega, the first commercially available electron microscope with integrated imaging Omega energy filter. Combining the capabilities of the imaging spectrometer with the principal operation modes of a TEM gives access to many new qualitative and quantitative techniques in electron microscopy. The basis for all of them is that the filter selecte electrons within a certain energy loss range ΔE1 <ΔE < ΔE2 and images their contribution to an image (electron spectroscopic imaging, ESI) or a diffraction pattern (electron spectroscopic diffraction, ESD) In many applications the filter is only used to remove the inelastically scattered electrons (elastic or zero loss filtering). Furthermore, the electron energy loss spectrum can be magnified and recorded with serial or parallel detection.