Abstract
The capability of computer controlled wavelength dispersive microprobe instrumentation was tested by application to quantitative analysis of multi-element garnet layers. The depth of X-ray production and influence of substrate were studied on films with thickness ranging from 0.7 to 15 μm. Test analyses of well-defined bulk garnet materials using selected polycrystalline and single crystal calibration standards showed the systematic error not exceed a value of ±0.3 wt% element, bringing it close to the limits imposed by the reproducibility of the measurements. The time required for a non-destructive analysis by automatic data acquisition and on-line matrix correction is about 200 s (9 elements) which is acceptable for routine analysis of large series of samples. This includes the measurement of concentrations <1 wt% with a reproducibility of about 15%.
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