Abstract
The electron energy distribution functions (EEDFs) were measured in the discharge plasma in pure helium and in helium with the addition of water vapor He:H2O (2:1). The studies were carried out in the discharge gap between the rectangular hollow cathode and the mesh anode using the original probe measurement system. It was established, in particular, that the EEDF in He had pronounced maxima in the regions of ∼4 eV and ∼15 eV, while in the He:H2O mixture there was no local maximum in the high-energy region. The EEDF calculations in the local approximation for experimental conditions were performed. It turned out that the calculated distribution functions differ noticeably from the measured ones. The possible physical causes leading to the discrepancy between the measured and calculated EEDFs were discussed.
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