Abstract
A study of electron paramagnetic resonance (EPR) of nitrogen-doped 6H-SiC is reported here. By use of both first- and second-harmonic EPR detection, the predicted spectral fingerprints for nitrogen pairs and triads were found at low temperatures. The pair spectrum was present in the second harmonic, while the spectral feature for both nitrogen pairs and triads was evidenced in the first harmonic. At least one nitrogen donor of the identified pairs and triads is located at one of the two available quasicubic carbon sites, and the other(s) could be at any one of the two quasicubic sites and the hexagonal carbon site.
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