Abstract
The amount of information which can be gained about an object is considerably improved by the incorporation of an imaging energy filter in a TEM. Besides the conventional modes of operation elastic brightfield (EBF) and darkfield (EDF) imaging or diffraction are provided by an Energy Filtering Transmission Electron Microscope (EFTEM) as well as Electron Spectroscopic Imaging (ESI) or Electron Energy Loss Spectroscopy (EELS). Thus, the demands for carefully designed highly flexible electron optics are much more sophisticated as compared to a CTEM.One of the most important parameters for elastic imaging and ESI is the width of the energy window, which can be selected by a slit aperture of adjustable width according to the particular needs. This energy window defines the size of the transferable specimen area or diffraction pattern, respectively, as well as the acceptance angle of the spectrometer. In order to meet the optimum parameters concerning the energy window and the size of the detection system (e.g. photographic plate, image plate, Slow Scan CCD camera (SSCCD), TV camera, electron detector, etc.) the magnifications of the pre- and of the post-spectrometer projector lens systems has to be independently adjustable.
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