Abstract

Electron neutral elastic collision frequency is measured over pressures ranging from 0.1–2.5 Torr in Ar, He, O 2 , Ar-He and Ar$- \mathrm {O}_{2}$ plasmas. Measurements are made with both grounded and fully floating hairpin resonator probes in a symmetric parallel plate capacitively coupled system driven at 13 MHz. Results are compared to hybrid plasma equipment module (HPEM) simulations, showing good agreement with simulated collision frequency. Results between grounded and floating probes are also compared.

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