Abstract
Cylindrical dc magnetron discharges in argon in post-cathode (direct) and hollow-cathode (inverted) configurations are studied experimentally and theoretically. The electron component is modelled based on the non-hydrodynamic solution of the Boltzmann kinetic equation in the radially inhomogeneous electric and axially directed uniform magnetic fields. Two different representations of the ionization operator involving discrete and continuous spectra of secondary electrons are studied. The form of the ionization operator is shown to affect the electron distribution functions and macroscopic properties. The absolute values and radial profiles of the electron density, excitation and ionization rates and charged particle fluxes are obtained and compared for the direct and inverted magnetron configurations.
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