Abstract

In this theoretical study on electron scattering with NFx (x = 1–3) targets in the energy range spanning from the ionisation threshold (I) to 2000 eV, we quantify various electron-driven molecular processes and report corresponding cross-sections. This study is prompted by the discrepancy between theoretical and experimental ionisation cross-sections ( Q ion ) for NFx (x = 1–3), containing highly electronegative fluorine, and the paucity of elastic and total ( Q tot ) cross-sections for these significant plasma relevant molecules. The quantum spherical complex optical potential method is used to derive elastic ( Q el ) and total ( Q tot ) cross-sections. To compute the Q ion , we employed a semi-empirical method, Complex Scattering Potential – ionisation contribution (CSP-ic). Present findings are compared with existing results available in the literature. This work is the first study to report Q el and Q tot for the two radicals NF and NF2.

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