Abstract
We revisit the problem of electron heating in capacitively coupled plasmas (CCPs), and propose a method for quantifying the level of collisionless and collisional heating in plasma simulations. The proposed procedure, based on the electron mechanical energy conservation equation, is demonstrated with particle-in-cell simulations of a number of single and multi-frequency CCPs operated in regimes of research and industrial interest. In almost all cases tested, the total electron heating is comprised of collisional (ohmic) and pressure heating parts. This latter collisionless component is in qualitative agreement with the mechanism of electron heating predicted from the recent re-evaluation of theoretical models. Finally, in very electrically asymmetric plasmas produced in multi-frequency discharges, we observe an additional collisionless heating mechanism associated with electron inertia.
Published Version
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