Electron cyclotron resonance plasma reactor for production of carbon stripper foil

Abstract

A graphite antenna for the production of carbon-containing hydrogen plasmas is being developed to prepare impurity-free charge exchange foils for high-energy synchrotrons. Microwave power at 2.45 GHz frequency drives a coaxial structure antenna with a 12-mm-diameter central graphite cylinder and a tapered surrounding cylinder serving as the ground electrode. The antenna was placed in a linear magnetic field to investigate how it performs under an electron cyclotron resonance (ECR) condition. A clear resonance phenomenon was observed in plasma luminosity, microwave power absorption, and microwave power reflection when the induction current used to produce a linear magnetic field was changed. The antenna realized the best microwave coupling to the plasma with the ECR zone formed 5 mm from the end of the center electrode. The antenna realized stable operation for more than 5 h with 100 W input microwave power and with operating hydrogen pressure from 0.5 to 50 Pa.