Abstract
We investigated the characteristics of microwave plasmas in various magnetic field strengths. It was found by controlling the magnetic field strength that plasmas produced at 100 Gauss have higher plasma parameters and better homogeneity than plasmas which satisfy the electron cyclotron resonance (ECR) condition ( B = 875 Gauss). The efficiency of microwave power absorption into the plasma is better at weak magnetic field strengths than that under the ECR condition because the absorption of microwaves occurs in the whole vacuum chamber at weak magnetic field strengths. From the point of view of device and power efficiency, plasmas obtained at weak magnetic field strengths are considered to be very useful for plasma processing.
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