Abstract
We present the results of a study of H− and O− formation in collisions between 0.5–4 keV hydrogen ions and oxygen ions and atoms with an Si surface. Measurements of scattered negative ion fractions are reported. These are found to be of the same magnitude as for clean metal surfaces like Al. A dynamic velocity-dependent effect in electron capture is observed. A non-resonant, velocity-dependent, charge transfer process, involving localized dangling bond surface states, is invoked to explain this observation. The production of positive ions is discussed.
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