Abstract
In the semiconductor industry electron beam testing has become an indispensable tool for chip verification during the design phase of integrated circuits and for failure analysis. Due to the fact that the e-beam may be influenced in many different ways, e.g. scanning, pulsing, synchronizing, a wide variety of e-beam testing techniques have been developed in the last twenty years. Some of these techniques have found widespread application and are available in commercial e-beam testers (EBT). This paper gives an overview of the different techniques and discusses their capabilities and limitations.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
