Abstract
This is a review of current developments in the field of ion-plasma and beam methods of synthesis of protective and functional dielectric coatings. We give rationales for attractiveness and prospects of creating such coatings by electron-beam heating and following evaporation of dielectric targets. Forevacuum plasma electron sources, operating at elevated pressure values from units to hundreds of pascals, make it possible to exert the direct action of an electron beam on low-conductive materials. Electron-beam evaporation of aluminum oxide, boron, and silicon carbide targets is used to exemplify the particular features of electron-beam synthesis of such coatings and their parameters and characteristics.
Highlights
Dielectric coatings based on oxides, nitrides, borides, carbides, and other compounds take up a special place among various functional and protective thin-film coatings
This article is a review of the current research on the creation of dielectric coatings by forevacuum plasma electron sources in comparison with the known methods of the beam and ion-plasma synthesis of such coatings
Plasma-enhanced chemical vapor deposition (PECVD) is a deposition method in which a coating is formed as a result of a chemical reaction occurring in plasma [52]
Summary
Dielectric coatings based on oxides, nitrides, borides, carbides, and other compounds take up a special place among various functional and protective thin-film coatings Such coatings are normally characterized by high hardness, temperature, and corrosion resistance, with the majority of them being electrically insulating [1]. Ceramic coatings, deposited onto the metal surfaces, are used to protect them from thermal and mechanical damage, corrosion, and premature wear Such coatings are widely used in the automotive and aerospace industries, nuclear energy, and medicine. The electron-beam transport region at an elevated of the forevacuum range effectively surface charging of non-conductive pressure of the forevacuum rangeneutralizes effectivelythe neutralizes the surface charging of materials by thematerials electron by beam. This article is a review of the current research on the creation of dielectric coatings by
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