Abstract
The impact of the irradiation with focused helium ion beam and electron beam on the cathodoluminescence (CL) of hexagonal boron nitride was investigated. It was shown that the irradiation with helium ions resulted in a decrease of the intensity of CL in the region 200–700 nm. Subsequent irradiation with electrons results in an increase of the intensity of 2 eV CL band comparing with its intensity in pristine material.
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