Electron beam source for the miniaturized electron microscope on-chip

Abstract

A tiny and light-weight miniaturized electron microscope would enable the research in the so-far inaccessible areas and harsh environments, including interplanetary exploration. There were already reported few designs of miniaturized electron microscopes, but our approach is different. Basing on well-known processes from the microelectronics technology we want to fabricate and bond permanently necessary components of the device. The silicon and glass are used as the building materials for an electronoptic column, a microfluidic chamber, and a micropump. The exception is an electron beam source that is formed from the carbon nanotube suspension. In this work, we propose to use a flat emitter instead of a point-type electron source in the so-called illuminating mode offering simple microengineering and technology compatibility. As result, the bonding ensures sealing of the eletronoptic microcolumn and enables maintaining the high vacuum inside. Moreover, we show the electron beam source works properly and it is possible to provide the electron beam focusing. The research paper presents the comprehensive performance of the electron beam source, at the various stage of the progress, i.e. in the diode and triode configurations, before and after the permanent anodic bonding process.