Abstract
Based on theory of electron beam optics[1], the beam optical calculations for an immersion lens and a unipotential lens have been performed. The computational results show that the beam optical calculations are consistent to the ray tracing and that the beam emittance is conserved, even if the third order aberrations exist.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
