Electron-beam modification of the near-surface layers of photosensitive glasses

Abstract

Electron-beam treatment of photosensitive silicate glasses doped with silver or copper ions leads to the formation of metal nanoparticles in the near-surface layer of a sample. The characteristics of this layer depend on the type of metal ions, pre- and postirradiation heat treatments, charge distribution, and conditions for the removal of electrons from the surface. A certain spatial profile of charge distribution can lead to the formation of lenslike structures with a thickness of 200–400 nm.